Application: | Silicon, Gallium Arsenide, Ceramic, Glass, Alumina |
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Type: | Fixed |
Power Source: | Servo Motor+Step Motor |
Condition: | New |
Workpiece Size: | Φ6’’ ≤160mm X 160mm |
Groove Depth: | ≤4mm |
Customization: |
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Configuration and performance | Workpiece size | Φ6" | ≤160mm x 160mm | |
Groove depth | ≤4mm | ||
Table flatness | ±0.005mm/150mm | ||
Alignment system | 70x straight light + ring light(210x optional) | ||
Spindle | Revolution speed range | 3000~40000 rpm | |
Output power | 1.5kW | ||
X axis | Drive mode | Servo motor | |
Max. stroke | 240mm | ||
Stroke resolution | 0.001mm | ||
Feed speed range | 0.1~400mm/s | ||
Y axis | Drive mode | Step motor + grating closed-loop control system | |
Max. stroke | 170mm | ||
Stroke resolution | 0.0005mm | ||
Single-step positioning accuracy | ≤0.003mm/5mm | ||
Index positioning accuracy | ≤0.005mm/170mm | ||
Z axis | Drive mode | Step motor | |
Max. stroke | 30mm | ||
Scale resolution | 0.001mm | ||
Repeatability accuracy | 0.002mm | ||
Θ axis | Drive mode | DD motor | |
Max. rotating angle | 380° | ||
Angle resolution | 0.0002° | ||
Basic specification | Power supply | Single phase, AC220V±10% | |
Power consumption | 0.8kW (processing) | ||
0.7kW (warming up) | |||
Compressed air | Pressure: 0.55~0.8Mpa; average flow rate: 350L/min | ||
Cleaning water | Pressure: 0.2~0.4Mpa; flow rate: 3.0L/min | ||
Cooling water | Pressure: 0.2~0.4Mpa; flow rate: 1.5L/min | ||
Exhaust air rate | 2m3/min (ANR) | ||
Overall dimensions W×D×H | 665mm×850mm×1650 mm | ||
Weight | 500kg |
Environmental Conditions |
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