Customization: | Available |
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Type: | Piezoresistive Pressure Sensor |
For: | Diffused Silicon Pressure Transmitter |
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Electrical performance parameters |
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Pressure range | -100kPa~0~10kPa…10MPa |
Pressure reference | Gauge pressure, Absolute pressure, Sealed gauge pressure |
Excitation | 1.5mA recommended for constant current |
Input impedance | Constant current: 2kΩ~5kΩ |
Electrical connection | Gold-plated KOVAR pin or silicon soft wire |
Compensated temp. | Constant current: 0ºC~60ºC(≤70kPa); -10ºC~70ºC(Other ranges) |
Operating temp. | -40ºC~120ºC |
Storage temp. | -40ºC~120ºC |
Insulation resistance | ≥200MΩ/250VDC |
Response time | ≤1ms(Up to 90%FS) |
Measuring medium | All the liquids and gases compatible with 316L. |
Mechanical vibration | 20g(20~5000HZ) |
Shock | 100g(10ms) |
Service life | 10×106(cycles) |
Structural performance parameters |
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Diaphragm material | 316L |
Clamp material | 316L |
Pressure port material | 304 |
Filling oil | Silicon oil |
Basic parameters |
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Item | Condition | Min | Nominal | Max | Unit | Note |
Nonlinearity | -0.3 | ±0.25 | 0.3 | %FS | Note(1) | |
Hysteresis | -0.05 | ±0.03 | 0.05 | %FS | ||
Repeatability | -0.05 | ±0.03 | 0.05 | %FS | ||
Zero output | -2 | ±1 | 2 | mV | ||
Full scale span output | 10kPa Other ranges |
30 60 |
90 |
150 |
mV | 1.5mA excitation |
Zero temp. coefficient | 10kPa Other ranges |
-2 -1.5 |
±1.5 ±0.75 |
2 1.5 |
%FS | Note(2) |
Span temp. coefficient | -1.5 | ±0.75 | 1.5 | %FS | Note(2) | |
Thermal hysteresis | -0.075 | ±0.05 | 0.075 | %FS | Note(3) | |
Long term stability | -0.3 | ±0.2 | 0.3 | %FS/Year |
Structure and dimensions |
Pressure range selection |
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Code | Pressure reference | Pressure range | Overpressure | Burst pressure |
10k | G | 0~10kPa | 300%FS | 600%FS |
20k | G | 0~20kPa | 300%FS | 600%FS |
35k | G | 0~35kPa | 300%FS | 600%FS |
70k | G | 0~70kPa | 300%FS | 600%FS |
100k | G, A | 0~100kPa | 200%FS | 500%FS |
160k | G, A | 0~160kPa | 200%FS | 500%FS |
250k | G, A | 0~250kPa | 200%FS | 500%FS |
400k | G | 0~400kPa | 200%FS | 500%FS |
600k | G | 0~600kPa | 200%FS | 500%FS |
1M | G | 0~1MPa | 200%FS | 500%FS |
1.6M | G, S | 0~1.6MPa | 200%FS | 500%FS |
2.5M | G, S | 0~2.5MPa | 200%FS | 500%FS |
4M | S | 0~4MPa | 200%FS | 400%FS |
6M | S | 0~6MPa | 200%FS | 400%FS |
10M | S | 0~10MPa | 200%FS | 400%FS |
N5k | Omitted | -100~250kPa | 750kPa | 1.25MPa |
N7k | Omitted | -100~600kPa | 1.2MPa | 3MPa |
N8M | Omitted | -0.1~1MPa | 2MPa | 5MPa |
N9M | Omitted | -0.1~1.6MPa | 3MPa | 9MPa |
N10M | Omitted | -0.1~2.5MPa | 5MPa | 12.5MPa |
How to order |