| Customization: | Available |
|---|---|
| Type: | Piezoresistive Pressure Sensor |
| For: | Diffused Silicon Pressure Transmitter |
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| Electrical performance parameters |
|
| Pressure range | -100kPa~0~10kPa…10MPa |
| Pressure reference | Gauge pressure, Absolute pressure, Sealed gauge pressure |
| Excitation | 1.5mA recommended for constant current |
| Input impedance | Constant current: 2kΩ~5kΩ |
| Electrical connection | Gold-plated KOVAR pin or silicon soft wire |
| Compensated temp. | Constant current: 0ºC~60ºC(≤70kPa); -10ºC~70ºC(Other ranges) |
| Operating temp. | -40ºC~120ºC |
| Storage temp. | -40ºC~120ºC |
| Insulation resistance | ≥200MΩ/250VDC |
| Response time | ≤1ms(Up to 90%FS) |
| Measuring medium | All the liquids and gases compatible with 316L. |
| Mechanical vibration | 20g(20~5000HZ) |
| Shock | 100g(10ms) |
| Service life | 10×106(cycles) |
| Structural performance parameters |
|
| Diaphragm material | 316L |
| Clamp material | 316L |
| Pressure port material | 304 |
| Filling oil | Silicon oil |
| Basic parameters |
||||||
| Item | Condition | Min | Nominal | Max | Unit | Note |
| Nonlinearity | -0.3 | ±0.25 | 0.3 | %FS | Note(1) | |
| Hysteresis | -0.05 | ±0.03 | 0.05 | %FS | ||
| Repeatability | -0.05 | ±0.03 | 0.05 | %FS | ||
| Zero output | -2 | ±1 | 2 | mV | ||
| Full scale span output | 10kPa Other ranges |
30 60 |
90 |
150 |
mV | 1.5mA excitation |
| Zero temp. coefficient | 10kPa Other ranges |
-2 -1.5 |
±1.5 ±0.75 |
2 1.5 |
%FS | Note(2) |
| Span temp. coefficient | -1.5 | ±0.75 | 1.5 | %FS | Note(2) | |
| Thermal hysteresis | -0.075 | ±0.05 | 0.075 | %FS | Note(3) | |
| Long term stability | -0.3 | ±0.2 | 0.3 | %FS/Year | ||
| Structure and dimensions |
| Pressure range selection |
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| Code | Pressure reference | Pressure range | Overpressure | Burst pressure |
| 10k | G | 0~10kPa | 300%FS | 600%FS |
| 20k | G | 0~20kPa | 300%FS | 600%FS |
| 35k | G | 0~35kPa | 300%FS | 600%FS |
| 70k | G | 0~70kPa | 300%FS | 600%FS |
| 100k | G, A | 0~100kPa | 200%FS | 500%FS |
| 160k | G, A | 0~160kPa | 200%FS | 500%FS |
| 250k | G, A | 0~250kPa | 200%FS | 500%FS |
| 400k | G | 0~400kPa | 200%FS | 500%FS |
| 600k | G | 0~600kPa | 200%FS | 500%FS |
| 1M | G | 0~1MPa | 200%FS | 500%FS |
| 1.6M | G, S | 0~1.6MPa | 200%FS | 500%FS |
| 2.5M | G, S | 0~2.5MPa | 200%FS | 500%FS |
| 4M | S | 0~4MPa | 200%FS | 400%FS |
| 6M | S | 0~6MPa | 200%FS | 400%FS |
| 10M | S | 0~10MPa | 200%FS | 400%FS |
| N5k | Omitted | -100~250kPa | 750kPa | 1.25MPa |
| N7k | Omitted | -100~600kPa | 1.2MPa | 3MPa |
| N8M | Omitted | -0.1~1MPa | 2MPa | 5MPa |
| N9M | Omitted | -0.1~1.6MPa | 3MPa | 9MPa |
| N10M | Omitted | -0.1~2.5MPa | 5MPa | 12.5MPa |
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